Machines for use in the production and manufacture of semiconductors, optical information storage materials and optical display apparatus; machines for the lacquering and coating of substrates and disks, machines for the hardening of coatings and lacquers, machines for the cleaning of substrates, disks, and of masks for semiconductor manufacture; machines for the inspection of substrates and disks, machines for the development of exposed substrates; machines for the etching of layers on substrates; manual and automatic handling components and apparatus; supply and preparation apparatus for fluids and gases; machines for the lacquering and coating of optical information storage materials; parts and fittings for all the aforesaid goods; all included in Class 7.;
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